Material Safety Data Sheets (MSDS)

Material Safety Data Sheets are sent out with every shipment of Voltaix® products. These sheets supply important information, which includes:

• Composition and Exposure Guidelines
• Hazards Identification
• Potential Health Effects
• First Aid Measures
• Fire Fighting Measures
• Accidental Release Measures
• Handling and Storage
• Exposure Control / Personal Protection
• Physical and Chemical Properties
• Stability and Reactivity
• Toxicological Information
• Ecological Information
• Disposal Considerations
• Transport Information
• Regulatory Information

Boron

> Trimethylboron > Trimethylboron ≥14% (Ar He H2 N2) > Trimethylboron 0.25-13.9% (Ar), 0.34-13.9% (He),    0.5-13.9% (H2, N2) > Trimethylboron <14% (SiH4) > Trimethylboron <0.5% (H2) > Trimethylboron <0.25% (Ar), <0.34% (He), <0.5% (N2) > Trimethylboron ≥14% (SiH4) > Diborane > Diborane ≥1.6% (Ar He H2 N2) > Diborane 0.4-1.5% (Ar), 0.54-1.5% (He), 0.8-1.5% (H2 N2) > Diborane <0.4% (Ar), <0.54% (He), <0.8% (N2) > Diborane <0.8% (H2) > Boron Trifluoride > Boron Trifluoride ≥16.1% (Ar He N2) > Boron Trifluoride <16.1% (Ar He N2) > Boron Trifluoride 16.1-91.7% (H2) > Boron Trifluoride <16.1% (H2)

Germanium

> Germane > Germane ≥12.4% (Ar He H2 N2) > Germane 0.25-12.3% (Ar), 0.34-12.3% (He), 0.5-12.3% (N2) > Germane <12.4% (H2) > Germane <0.25% (Ar), <0.34% (He), <0.5% (N2) > Digermane > Digermane ≥6.2% (Ar He H2 N2) > Digermane 0.25-6.1% (Ar), 0.34-6.1% (He), 0.5-6.1% (N2) > Digermane <6.2% (H2) > Digermane <0.25% (Ar), <0.34% (He), <0.5% (N2) > Germanium Tetrafluoride > Enriched Germanium Tetrafluoride > Germanium Tetrafluoride ≥9% (Ar He N2) > Germanium Tetrafluoride <9% (Ar He N2)

Organosilanes

> Methylsilane > Methylsilane ≥0.25% (Ar), ≥0.34% (He), ≥0.5% (N2) > Methylsilane Any (H2) > Methylsilane <0.25% (Ar), <0.34% (He), <0.5% (N2)

Silicon

> Silane > Silane ≥0.5 (Ar), ≥0.67% (He), ≥1% (N2 H2) > Silane <1% (H2) > Silane <0.5-% (Ar), <0.67% (He), <1% (N2) > Disilane > Disilane ≥0.1% (Ar), ≥0.13% (He), ≥0.2% (N2 H2) > Disilane <0.2% (H2) > Disilane <0.1% (Ar), <0.13 (He), <0.2% (N2) > Silicon Tetrafluoride > Silicon Tetrafluoride ≥9% (Ar He N2) > Silicon Tetrafluoride <9% (Ar He N2) > Silicon Tetrafluoride >9% (H2) > Dichlorosilane > Dichlorosilane ≥6.25% (Ar He N2) > Dichlorosilane 2.09-6.24% (Ar), 2.78-6.24% (He), 4.1-6.24% (N2) > Dichlorosilane <6.25% (H2) > Dichlorosilane <2.09% (Ar), < 2.78% (He), < 4.1% (N2) > Trisilane > Trisilane >0.1% (Ar,He, H2, N2) > Trisilane <0.1% (Ar, He, N2) > Deut. Silane > Dimethylsilane > Trimethylsilane > Trimethylsilane > 0.8% in Ar, > 1.0% in He,    or > 1.6% in N2 > Trimethylsilane <0.8% in Ar, <1.0% in He, or N1.6% in N2 > Tetramethylsilane

Phosphorous

> Phosphine > Phosphine >2.2% (Ar He H2 N2) > Phosphine 0.25-2.2% (Ar), 0.34-2.2% (He), 0.5-2.2% (H2 N2) > Phosphine <0.25% (Ar), <0.34% (He), <0.5% (N2) > Phosphine <0.5% (H2) > Phosphine ≥2.2% (SiH4) > Phosphine <2.2% (SiH4)

Carrier Gas

> Argon > Hydrogen > Deuterium > Helium > Nitrogen

Other Gases

> Methane > Methane ≥9.1% (Ar), ≥12.00% (He), ≥14.3% (N2) > Methane <9.1% (Ar),<12.00% (He), Methane <14.3% (N2) > Methane Any (H2) > Sulfur Dioxide