Material Safety Data Sheets (MSDS)

Material Safety Data Sheets are sent out with every shipment of Voltaix® products. These sheets supply important information, which includes:
  • Composition and Exposure Guidelines
  • Hazards Identification
  • Potential Health Effects
  • First Aid Measures
  • Fire Fighting Measures
  • Accidental Release Measures
  • Handling and Storage
  • Exposure Control / Personal Protection
  • Physical and Chemical Properties
  • Stability and Reactivity
  • Toxicological Information
  • Ecological Information
  • Disposal Considerations
  • Transport Information
  • Regulatory Information

Boron
> Trimethylboron
> Trimethylboron ≥14% (Ar He H2 N2)
> Trimethylboron 0.54-13.9% (Ar,He,H2,N2)
> Trimethylboron <14% (SiH4)
> Trimethylboron <0.54% (H2)
> Trimethylboron <0.54% (Ar,He,N2)
> Trimethylboron ≥14% (SiH4)
> Trimethylboron <14%, Silane >0.8% (Ar,He,H2,N2)
> Deut. Trimethylboron
> Deut. Trimethylboron 0.54-13.9% (Ar,He,H2,N2)
> Diborane
> Diborane ≥1.6% (Ar,He,H2,N2)
> Diborane ≥0.4% but ≤ 1.5% (Ar,He,H2,N2)
> Diborane <0.4% (Ar,He,N2)
> Diborane ≤0.4% (H2)
> Deut. Diborane
> Deut. Diborane 0.4-1.5% (Ar,He,N2,H2)
> Deut. Diborane ≥1.6% (Ar,He,H2,N2)
> Deut. Diborane ≥1.6% (D2)
> Enriched 11B Diborane
> Enriched Diborane Flammable Mixtures (Ar,He,H2,N2)
> Enriched Diborane Toxic Mixtures (Ar,He,H2,N2)
> Boron Trifluoride
> Enriched 10B Boron Trifluoride
> Enriched 11B Boron Trifluoride
> Boron Trifluoride 0.2-16.1% in Silane
> Boron Trifluoride ≥16.1% in Silane
> Boron Trifluoride ≥16.1% (Ar He N2)
> Boron Trifluoride <16.1% (Ar He N2)
> Boron Trifluoride 16.1-91.7% (H2)
> Boron Trifluoride <16.1% (H2)
Germanium
> Germane
> Germane ≥12.4% (Ar He H2 N2)
> Germane 0.25-12.3% (Ar), 0.34-12.3% (He), 0.5-12.3% (N2)
> Germane <12.4% (H2)
> Germane <0.25% (Ar), <0.34% (He), <0.5% (N2)
> Deut. Germane
> Digermane
> Digermane ≥6.2% (Ar He H2 N2)
> Digermane 0.25-6.1% (Ar), 0.34-6.1% (He), 0.5-6.1% (N2)
> Digermane <6.2% (H2)
> Digermane <0.25% (Ar), <0.34% (He), <0.5% (N2)
> Germanium Tetrafluoride
> Germanium Tetrafluoride <6.38% (Ar He N2)
> Germanium Tetrafluoride ≥6.38% (Ar He N2)
> Germanium Tetrafluoride ≥6.38% (H2)
> Germanium Tetrafluoride <6.38% (H2)
> Germanium Tetrafluoride Enriched 72
Organosilanes
> Methylsilane
> Methylsilane ≥0.25% (Ar), ≥0.34% (He), ≥0.5% (N2)
> Methylsilane Any (H2)
> Methylsilane <0.25% (Ar), <0.34% (He), <0.5% (N2)
> Dimethylsilane
> Trimethylsilane
> Trimethylsilane > 0.8% in Ar, > 1.0% in He,
   or > 1.6% in N2
> Trimethylsilane in H2
> Trimethylsilane <0.8% in Ar, <1.0% in He, or N1.6% in N2
> Tetramethylsilane
Silicon
> Silane
> Silane ≥0.5 (Ar), ≥0.67% (He), ≥1% (N2 H2)
> Silane <1% (H2)
> Silane <0.5-% (Ar), <0.67% (He), <1% (N2)
> Silane ≥1.0% (D2)
> Disilane
> Disilane any concentration in Silane
> Disilane ≥0.1% (Ar), ≥0.13% (He), ≥0.2% (N2 H2)
> Disilane <0.2% (H2)
> Disilane <0.1% (Ar), <0.13 (He), <0.2% (N2)
> Silicon Tetrafluoride
> Silicon Tetrafluoride ≥9% (Ar He N2)
> Silicon Tetrafluoride <9% (Ar He N2)
> Silicon Tetrafluoride >9% (H2)
> Silicon Tetrafluoride <9% (H2)
> Trisilane
> Trisilane >0.1% (Ar,He, H2, N2)
> Trisilane <0.1% (Ar, He, N2)
> Trisilylamine
> Monochlorosilane
> Tetrasilane
Phosphorous
> Phosphine
> Phosphine ≥0.4% (Ar He H2 N2)
> Phosphine <0.4% (H2)
> Phosphine <0.4% (Ar He N2)
> Phosphine ≥0.4% (SiH4)
> Phosphine <0.4% (SiH4)
Carrier Gas
> Argon
> Hydrogen
> Deuterium
> Helium
> Nitrogen
Other Gases
> Methane
> Methane ≥9.1% (Ar), ≥12.00% (He), ≥14.3% (N2)
> Methane <9.1% (Ar),<12.00% (He), Methane <14.3% (N2)
> Methane Any (H2)
> Sulfur Dioxide
> Deuterated Ammonia
> Deuterated Ammonia <5% (Ar,He,N2)
> Stannane d4 <1.0% (H2,D2)
> Enriched Deuterated Diborane Mixtures (≥1.6% in Ar, He, H or N)
> Enriched Trimethylboron
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